Name and Manufacturer

JXA 8900 R Electron Probe Microanalyzer
www.jeol.com

Electron Gun

5 - 30 keV acceleration potential
approx. 1 μA max. probe current (depending on aperture)

Detectors

Backscatter electron detector
Secondary electron detector
Cathodoluminescence detector
EDX detector

Additional

sound monitoring of x-ray intensity
optical microscope
autofocus system
beam stabilizer

WD Spectrometer 1

TAP, PET, LDEB, LDE1
14 cm Rowland circle
Ar-gas flow counter

WD Spectrometer 2

LiF, PET
14 cm Rowland circle
sealed Xe counter

WD Spectrometer 3

PET, LiF
14 cm Rowland circle
sealed Xe counter

WD Spectrometer 4

TAP, LDE2
14 cm Rowland circle
Ar-gas flow counter

WD Spectrometer 5

LiFH, PETH
10 cm Rowland circle
sealed Xe counter

EDX System

Jeol integrated system, Si(Li) ED detector
resolution 135 eV at Mn Kα

Vacuum System

Seiko turbo molecular pump, final pressure: app. 4*10^-6 mbar
Ion Getter Pump for eletron gun

Periphericals

Pointlogger System with Leitz optical microscope, directly connected to the EPMA workstation
Image storing system
Second HP workstation
Laser, ink and thermoprinters

WD Software

ZAF and phi-rho-z (Armstrong, 1995) online and offline matrix correction
Phase Analysis Program
Line Analysis Program with Map Data Processing Functions
Qualitative Analysis Program
Thin Film Analysis Program

Carbon Coating

Cressington 208 Carbon Coater

Annual expenses

approx. 18000 Euro (only maintenance and spares)